Nano Research Facility School of Engineering & Applied Science
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Micro- and Nano-fabrication

Location: 017 Brauer Hall on the Danforth Campus

Lab Telephone: 314-935-5841

Schedule Training Session

 
Photo Lithography

Headway PWM32-PS-CB15PL Spin Coater

Substrate Cleaning Protocol

Lithography Protocol

Spin Coater Operating Procedures

Application Notes

Soft Lithography

SCS G3 Spin Coater

PDMS and h-PDMS Fabrication Protocol

Micro-contact Printing Protocol

Molding and Embossing Protocol

Deposition and Growth

Edwards Auto 306 Thermal Evaporator

Lift-off Protocol

Thermal Evaporator Operating Procedure

Etching

Oxford Plasmalab 100 ICP-Reactive Ion Etcher

RIE Operating Procedures

Application Notes